Open AccessDeposition Characteristics of TiO<sub>2</sub> Thin Films Prepared by DC Pulsed Magnetron Sputtering
Author(s) -
Eunsol An,
Seongkum Heo,
KyuSik Kim,
Uoo Chang Jung,
Taesung Park,
In-Wook Park
Publication year - 2015
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2015.48.2.43
Subject(s) - materials science , scanning electron microscope , sputter deposition , microstructure , surface roughness , substrate (aquarium) , thin film , pulsed dc , cavity magnetron , deposition (geology) , sputtering , composite material , surface finish , fabrication , contact angle , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , medicine , paleontology , oceanography , alternative medicine , pathology , sediment , geology , biology , chromatography , engineering