Open AccessDesign and Fabrication of Dual Tip Si3N4Probe for Dip-pen Nanolithograpy
Author(s) -
Kyung Ho Kim,
Youngho Han
Publication year - 2014
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2014.47.6.362
Subject(s) - fabrication , nanolithography , materials science , microelectromechanical systems , dip pen nanolithography , nanotechnology , surface micromachining , dual (grammatical number) , residual stress , optoelectronics , curvature , deposition (geology) , composite material , medicine , art , paleontology , alternative medicine , literature , geometry , mathematics , pathology , sediment , biology