Open AccessA Comparative Study of CrN Coatings Deposited by DC and Asymmetric Bipolar Pulsed DC Sputtering
Author(s) -
SungYong Chun,
Ji-Won Baek
Publication year - 2014
Publication title -
journal of the korean institute of surface engineering
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2014.47.2.086
Subject(s) - pulsed dc , materials science , sputtering , duty cycle , nitride , grain size , chromium nitride , oscilloscope , optoelectronics , pulsed power , chromium , sputter deposition , metallurgy , composite material , thin film , nanotechnology , electrical engineering , layer (electronics) , voltage , engineering
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