Open AccessFabrication and Characteristics of NiO-AZO Thin Films Deposited by Co-sputtering System for GaN LED Transparent Contact Electrode
Author(s) -
Hee-Woo Park,
Joonho Bang,
Kwun Nam Hui,
Pung Keun Song
Publication year - 2011
Publication title -
journal of the korean institute of surface engineering
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2011.44.6.250
Subject(s) - non blocking i/o , sputtering , fabrication , materials science , electrode , optoelectronics , thin film , sputter deposition , nanotechnology , chemistry , catalysis , medicine , biochemistry , alternative medicine , pathology
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