Open AccessCharacterization of Ga, Al or In Doped ZnO Films Deposited by DC Magnetron Sputtering
Author(s) -
Sang-Eun Park,
Se-Hun Park,
Lue jie,
Pung Keun Song
Publication year - 2008
Publication title -
journal of the korean institute of surface engineering
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2008.41.4.142
Subject(s) - materials science , dopant , doping , substrate (aquarium) , sputter deposition , electrical resistivity and conductivity , analytical chemistry (journal) , sputtering , band gap , thin film , transmittance , cavity magnetron , ceramic , optoelectronics , composite material , nanotechnology , chemistry , oceanography , engineering , chromatography , electrical engineering , geology
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