Open AccessCharacterization of a Remote Inductively Coupled Plasma System
Author(s) -
Yeong-Uk Kim,
Won-Kyun Yang,
Ji Bong Joo
Publication year - 2008
Publication title -
han-gug pyomyeon geumsog hag-hoe/han-guk pyomyeon gonghak hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2008.41.4.134
Subject(s) - langmuir probe , inductively coupled plasma , plasma , materials science , substrate (aquarium) , torr , plasma diagnostics , plasma parameters , inductively coupled plasma atomic emission spectroscopy , analytical chemistry (journal) , thermocouple , tube (container) , optoelectronics , chemistry , physics , oceanography , chromatography , quantum mechanics , composite material , thermodynamics , geology