Open AccessSolid Phase Crystallization Kinetics of Amorphous Silicon at High Temperatures
Author(s) -
WonEui Hong,
Bokyung Kim,
JaeSang Ro
Publication year - 2008
Publication title -
journal of the korean institute of surface engineering
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2008.41.2.048
Subject(s) - crystallization , materials science , kinetics , nucleation , silicon , wafer , activation energy , amorphous solid , phase (matter) , amorphous silicon , substrate (aquarium) , chemical engineering , crystallography , thermodynamics , analytical chemistry (journal) , crystalline silicon , nanotechnology , chemistry , metallurgy , chromatography , physics , oceanography , organic chemistry , quantum mechanics , geology , engineering
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