Open AccessEffect of Oxygen Addition on Residual Stress Formation of Cubic Boron Nitride Thin Films
Author(s) -
Hee-Yeon Jang,
JongKeuk Park,
WookSeong Lee,
YoungJoon Baik,
Dae-Soon Lim,
Jeung-hyun Jeong
Publication year - 2007
Publication title -
journal of the korean institute of surface engineering
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2007.40.2.091
Subject(s) - materials science , nucleation , oxygen , boron nitride , phase (matter) , residual stress , microstructure , analytical chemistry (journal) , cubic crystal system , hexagonal phase , grain size , grain boundary , crystallography , metallurgy , nanotechnology , chemistry , organic chemistry
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