Open AccessMeasurement accuracy analysis for microgeometry nanostandards with microinterferometer and stylus profilometer
Author(s) -
Łukasz Ślusarski
Publication year - 2018
Publication title -
biuletyn wojskowej akademii technicznej
Language(s) - English
Resource type - Journals
ISSN - 1234-5865
DOI - 10.5604/01.3001.0012.8503
Subject(s) - stylus , profilometer , nanometrology , optics , materials science , surface metrology , surface finish , metrology , computer science , computer vision , physics , composite material
The goal of the work, described in this paper, was to examine and analyse measurementcapabilities of GUM Length and Angle Department in measurements of step height/depth standardswith the values below 1 μm (nanostandards), with 2D, and 3D surface characteristics. Measurementswere performed with microinterforometer and stylus profilometer.Keywords: nanometrology, depth/height standards, microinterferometry, contact profilometry.