Open AccessA novel fault detection approach based on multilinear sparse PCA: application onthe semiconductor manufacturing processes
Author(s) -
Riadh Toumi,
YAHIA KOURD,
DIMITRI LEFEBVRE
Publication year - 2022
Publication title -
turkish journal of electrical engineering and computer sciences/elektrik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.225
H-Index - 30
eISSN - 1303-6203
pISSN - 1300-0632
DOI - 10.55730/1300-0632.3867
Subject(s) - batch processing , computer science , fault detection and isolation , statistical process control , process (computing) , data mining , constant false alarm rate , vectorization (mathematics) , artificial intelligence , parallel computing , actuator , programming language , operating system