Open AccessAn Experimental Study of the Oxygen Permeability of a PET Film With a Nanosized Aluminum Oxide Layer
Author(s) -
С. П. Королев,
К. С. Кравчук,
В. П. Панченко,
Л. А. Сейдман,
A. M. Soroka
Publication year - 2022
Publication title -
applied physics research
Language(s) - English
Resource type - Journals
eISSN - 1916-9647
pISSN - 1916-9639
DOI - 10.5539/apr.v14n1p8
Subject(s) - materials science , oxide , oxygen , sputter deposition , aluminium , surface roughness , layer (electronics) , equivalent oxide thickness , aluminum oxide , sputtering , permeability (electromagnetism) , chemical engineering , surface finish , composite material , thin film , nanotechnology , metallurgy , chemistry , gate oxide , physics , biochemistry , organic chemistry , transistor , quantum mechanics , voltage , membrane , engineering
Results of an experimental study of the oxygen permeability of a PET film with nanosized aluminum oxide layers formed by reactive magnetron sputtering have been described. An experimental dependence of the oxygen permeability coefficient of PET film with the aluminum oxide layer in the range of 20 ÷ 80 nm, providing its value up to 1 cm3/(m2∙24h∙0.1MPa), have been determined. The effect of various factors on the formation of a high-quality reproducible oxide PET film and the characteristics of a nanosized aluminum oxide layer and the specific electric energy consumption for the magnetron deposition of the layer has been defined. The planar surface structures and surface roughness parameters of PET and oxide films with layers of different thicknesses have been determined. A qualitative interpretation of the results has been given.