Open AccessEnergy Distribution Functions of Ions Generated by a Circular-type Anode Layer Ion Source
Author(s) -
Nopphon Saowiang,
Nitisak Pasaja,
Phitsanu Poolcharuansin
Publication year - 2022
Publication title -
current applied science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.14
H-Index - 3
ISSN - 2586-9396
DOI - 10.55003/cast.2022.01.23.008
Subject(s) - ion , anode , atomic physics , range (aeronautics) , ion beam deposition , materials science , cathode , ion source , plasma , ion gun , ion beam , etching (microfabrication) , analytical chemistry (journal) , chemistry , layer (electronics) , physics , electrode , nanotechnology , organic chemistry , quantum mechanics , chromatography , composite material