Open AccessAnalysis of Inductively Coupled Plasma using Electrostatic Probe and Fluid Simulation
Author(s) -
J. Cha,
Hojun Lee
Publication year - 2016
Publication title -
jeon-gi hakoe nonmunji/jeon'gi haghoe nonmunji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.174
H-Index - 11
eISSN - 2287-4364
pISSN - 1975-8359
DOI - 10.5370/kiee.2016.65.7.1211
Subject(s) - inductively coupled plasma , plasma , atomic physics , electron temperature , electron density , langmuir probe , electron , chemistry , plasma parameters , plasma diagnostics , analytical chemistry (journal) , materials science , physics , chromatography , quantum mechanics