Open AccessFabrication of Microwave PECVD with Linear Antenna for large-scale deposition processing, and Analysis of Ar plasma characteristics using Electrostatic Probe and Temperature Characteristics
Author(s) -
Moon-Ki Han,
Kwon-Sang Seo,
Dong-Hyun Kim,
HoJun Lee
Publication year - 2015
Publication title -
the transactions of the korean institute of electrical engineers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.174
H-Index - 11
eISSN - 2287-4364
pISSN - 1975-8359
DOI - 10.5370/kiee.2015.64.3.422
Subject(s) - antenna (radio) , microwave , materials science , optics , waveguide , quartz , plasma enhanced chemical vapor deposition , electron temperature , electron density , plasma , optoelectronics , chemical vapor deposition , physics , electrical engineering , composite material , quantum mechanics , engineering
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