Open AccessMicrofabrication of Vertical Carbon Nanotube Field-Effect Transistors on an Anodized Aluminum Oxide Template Using Atomic Layer Deposition
Author(s) -
Sunghwan Jung
Publication year - 2015
Publication title -
journal of electrical engineering and technology/journal of electrical engineering and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7423
pISSN - 1975-0102
DOI - 10.5370/jeet.2015.10.3.1169
Subject(s) - materials science , atomic layer deposition , anodizing , carbon nanotube , nanotechnology , layer (electronics) , oxide , deposition (geology) , nanotube , field effect transistor , gate oxide , etching (microfabrication) , optoelectronics , transistor , aluminium , composite material , metallurgy , electrical engineering , paleontology , engineering , voltage , sediment , biology