Open AccessA Study on the Development of Measurement Techniques for Thermal Flows in MEMS
Author(s) -
Han Seo Ko,
Sangsik Yang,
JaeHyuck Yoo,
Hyun-Jung Kim
Publication year - 2006
Publication title -
journal of electrical engineering and technology/journal of electrical engineering and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.226
H-Index - 27
eISSN - 2093-7423
pISSN - 1975-0102
DOI - 10.5370/jeet.2006.1.3.387
Subject(s) - microelectromechanical systems , thermal , development (topology) , computer science , materials science , mathematics , nanotechnology , physics , meteorology , mathematical analysis