Open AccessSilicon Prism-based NIR Spectrometer Utilizing MEMS Technology
Author(s) -
Dong Geon Jung,
Su Hee Son,
Sun Young Kwon,
Jun Yeop Lee,
Seong Ho Kong
Publication year - 2017
Publication title -
journal of sensor science and technology
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2017.26.2.91
Subject(s) - prism , spectrometer , microelectromechanical systems , materials science , near infrared spectroscopy , substrate (aquarium) , silicon , optics , fabrication , optoelectronics , infrared , bolometer , detector , physics , medicine , oceanography , alternative medicine , pathology , geology
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