Open AccessChemiresistive Sensor Array Based on Semiconducting Metal Oxides for Environmental Monitoring
Author(s) -
Hi Gyu Moon,
Soo Deok Han,
MinGyu Kang,
Woosuk Jung,
Ho Won Jang,
Kwang Soo Yoo,
HyungHo Park,
ChongYun Kang
Publication year - 2014
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2014.23.1.15
Subject(s) - fabrication , photolithography , substrate (aquarium) , materials science , sputtering , etching (microfabrication) , thin film , optoelectronics , electrode , nanotechnology , layer (electronics) , chemistry , medicine , oceanography , alternative medicine , pathology , geology
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