Open AccessNiO Films Formed at Room Temperature for Microbolometer
Author(s) -
YoungChul Jung,
Gyo-hun Koo,
Jaesung Lee,
SungHo Hahm,
Yong Soo Lee
Publication year - 2013
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2013.22.5.327
Subject(s) - bolometer , non blocking i/o , electrical resistivity and conductivity , microbolometer , nickel oxide , materials science , nickel , sputtering , substrate (aquarium) , oxide , omega , analytical chemistry (journal) , optoelectronics , thin film , metallurgy , nanotechnology , optics , electrical engineering , physics , chemistry , biochemistry , oceanography , chromatography , quantum mechanics , detector , geology , engineering , catalysis
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