Open AccessCharacteristics of SAW humidity sensor using nanocrystalline ZnO films
Author(s) -
Hoang Si Hong,
GwiySang Chung
Publication year - 2010
Publication title -
senseo haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2010.19.5.337
Subject(s) - materials science , wurtzite crystal structure , nanocrystalline material , relative humidity , humidity , thin film , crystallite , nitride , surface acoustic wave , composite material , annealing (glass) , optoelectronics , sputtering , grain size , layer (electronics) , nanotechnology , metallurgy , optics , zinc , physics , thermodynamics