Open AccessEffects of metal catalysts on the characteristics of NO sensor using ZnO thin film as sensing material
Author(s) -
GwiySang Chung,
JaeMin Jeong
Publication year - 2010
Publication title -
senseo haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2010.19.1.058
Subject(s) - thin film , materials science , fabrication , sputtering , sensitivity (control systems) , sputter deposition , adsorption , catalysis , optoelectronics , metal , analytical chemistry (journal) , nanotechnology , metallurgy , electronic engineering , chemistry , chromatography , medicine , alternative medicine , pathology , engineering , biochemistry