Open AccessGrowth of polycrystalline 3C-SiC thin films for M/NEMS applications by CVD
Author(s) -
GwiySang Chung,
Kang-San Kim,
JunHo Jeong
Publication year - 2007
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2007.16.2.085
Subject(s) - materials science , x ray photoelectron spectroscopy , thin film , scanning electron microscope , crystallite , optoelectronics , nanoelectromechanical systems , reflection high energy electron diffraction , silicon carbide , wafer , analytical chemistry (journal) , nanotechnology , chemical engineering , chemistry , composite material , layer (electronics) , epitaxy , nanoparticle , nanomedicine , chromatography , engineering , metallurgy
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