Open AccessSOI CMOS image sensor with pinned photodiode on handle wafer
Author(s) -
Yong-Soo Cho,
Hidekuni Takao,
Kazuaki Sawada,
M. Ishida,
Sie−Young Choi
Publication year - 2006
Publication title -
senseo haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2006.15.5.341
Subject(s) - photodiode , optoelectronics , wafer , materials science , dark current , silicon on insulator , shallow trench isolation , image sensor , transistor , cmos , diffusion current , photodetector , optics , trench , voltage , electrical engineering , physics , silicon , engineering , current (fluid) , nanotechnology , layer (electronics)