Open AccessDevelopment of silicon based flexible tactile sensor array mounted on flexible PCB
Author(s) -
K.N. Kim,
Y.K. Kim,
K.R. Lee,
W.S. Cho,
D.S. Lee,
N.K. Cho,
W.H. Kim,
J.H. Park,
S.W. Kim,
ByeongKwon Ju
Publication year - 2006
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2006.15.4.277
Subject(s) - tactile sensor , fabrication , flexibility (engineering) , surface micromachining , materials science , shear force , bulk micromachining , normal force , process (computing) , optoelectronics , acoustics , electrical engineering , electronic engineering , engineering , computer science , composite material , physics , pathology , artificial intelligence , operating system , medicine , statistics , alternative medicine , mathematics , mechanics , robot
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