Open AccessStudy of sand blaster dry etched glass wafer surface for micro device package
Author(s) -
Jongseok Kim,
Kwang-Woo Nam,
SungHoon Choa,
JaeHong Kwon,
ByeongKwon Ju
Publication year - 2006
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2006.15.4.245
Subject(s) - wafer , dry etching , materials science , microelectromechanical systems , dry cleaning , etching (microfabrication) , composite material , wet cleaning , optoelectronics , engineering , chemistry , waste management , organic chemistry , layer (electronics)
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