Open AccessA Study on the Fabrication of the Lateral Accelerometer using SOG(Silicon On Glass) Process
Author(s) -
Bumkyoo Choi,
Tae-Ha Chang,
Chang-Kil Lee,
Kyu-Dong Jung,
Jong-Pal Kim
Publication year - 2004
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2004.13.6.430
Subject(s) - wafer , microelectromechanical systems , materials science , accelerometer , fabrication , optoelectronics , electronic engineering , layer (electronics) , capacitance , silicon , process (computing) , nanotechnology , computer science , engineering , chemistry , electrode , medicine , alternative medicine , pathology , operating system
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