Open AccessThe Diaphragm Structure Using the Local Surface Etching for the Improvement of Sensitivity Characteristics
Author(s) -
Gon-Jae Lee,
Dong-Hwan Oh,
Jong-Hong Lee,
SungJin Kim
Publication year - 2004
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2004.13.4.309
Subject(s) - boss , diaphragm (acoustics) , sensitivity (control systems) , materials science , linearity , etching (microfabrication) , fabrication , pressure sensor , acoustics , composite material , engineering , electronic engineering , mechanical engineering , vibration , physics , metallurgy , medicine , alternative medicine , layer (electronics) , pathology
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