Open AccessFabrication and Characteristics of Tantalum Nitride Thin-Film Strain Gauges
Author(s) -
GwiySang Chung,
Hyung-Soon Woo,
Sun-Chul Kim,
Dae-Sun Hong
Publication year - 2004
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2004.13.4.303
Subject(s) - tantalum , tantalum nitride , materials science , strain gauge , temperature coefficient , annealing (glass) , thin film , analytical chemistry (journal) , nitride , sputtering , gauge factor , torr , electrical resistivity and conductivity , sputter deposition , argon , fabrication , ceramic , composite material , metallurgy , electrical engineering , chemistry , nanotechnology , physics , thermodynamics , alternative medicine , pathology , engineering , chromatography , layer (electronics) , medicine , organic chemistry
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