Open AccessDevelopment of the High Temperature Silicon Pressure Sensor
Author(s) -
Mi-Mook Kim,
Tae-Chul Nam,
YoungTae Lee
Publication year - 2004
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2004.13.3.175
Subject(s) - silicon , materials science , piezoresistive effect , wafer , substrate (aquarium) , layer (electronics) , optoelectronics , pressure sensor , hysteresis , silicon bandgap temperature sensor , linearity , atmospheric temperature range , sensitivity (control systems) , electrical engineering , composite material , electronic engineering , voltage , mechanical engineering , condensed matter physics , oceanography , physics , meteorology , engineering , voltage divider , dropout voltage , geology
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