Open AccessFabrication and characteristics of electrostatic micro mirror for optical disk drives
Author(s) -
JongWan Kim,
Hwa-Il Seo,
Wooyoung Lee,
Kyung-Hwa Rim,
Young-Jo Jang
Publication year - 2002
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2002.11.1.039
Subject(s) - polishing , lapping , microelectromechanical systems , fabrication , materials science , optics , deformable mirror , laser , track (disk drive) , reliability (semiconductor) , optoelectronics , mechanical engineering , adaptive optics , engineering , physics , medicine , alternative medicine , pathology , composite material , power (physics) , quantum mechanics
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