Open AccessFabrication of the thermopile using SOI structure
Publication year - 2002
Publication title -
senseo haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2002.11.1.001
Subject(s) - thermopile , silicon on insulator , materials science , fabrication , strips , silicon , thermoelectric effect , optoelectronics , seebeck coefficient , substrate (aquarium) , thermal conductivity , optics , composite material , physics , medicine , oceanography , alternative medicine , pathology , infrared , thermodynamics , geology