Open AccessFabrication of the thermopile using SOI structure
Author(s) -
YoungTae Lee,
Hidekuni Takao,
Mákoto Ishida
Publication year - 2002
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.5369/jsst.2002.11.1.001
Subject(s) - thermopile , silicon on insulator , materials science , fabrication , strips , silicon , thermoelectric effect , optoelectronics , seebeck coefficient , substrate (aquarium) , thermal conductivity , optics , composite material , physics , medicine , oceanography , alternative medicine , pathology , infrared , thermodynamics , geology
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