Open AccessEVALUATION OF FAR-INFRARED BIB-TYPE GE DETECTORS FABRICATED WITH THE SURFACE-ACTIVATED WAFER BONDING TECHNOLOGY
Author(s) -
Misaki Hanaoka,
Hidehiro Kaneda,
Shinki Oyabu,
Yosuke Hattori,
Kotomi Tanaka,
Sota Ukai,
Kazuyuki Shichi,
Takehiko Wada,
Toyoaki Suzuki,
Kentaroh Watanabe,
Koichi Nagase,
Shigeo Baba,
Chihiro Kochi
Publication year - 2017
Publication title -
ceonmunhag noncong/cheonmunhak nonchong
Language(s) - English
Resource type - Journals
eISSN - 2287-6936
pISSN - 1225-1534
DOI - 10.5303/pkas.2017.32.1.351
Subject(s) - wafer , detector , materials science , optoelectronics , far infrared , infrared , spectrometer , infrared detector , optics , physics