Open AccessA Wafer Alignment Method and Accuracy Evaluation
Publication year - 2002
Publication title -
je'eo jadong'hwa siseutem gonghag nonmunji
Language(s) - English
Resource type - Journals
ISSN - 1225-9845
DOI - 10.5302/j.icros.2002.8.9.812
Subject(s) - wafer , eccentricity (behavior) , orientation (vector space) , enhanced data rates for gsm evolution , rotation (mathematics) , position (finance) , standard deviation , development (topology) , geometry , optics , mathematics , materials science , computer science , physics , mathematical analysis , optoelectronics , statistics , computer vision , finance , political science , law , economics