THE METHODS ANALYSIS OF ACHIEVEMENT OF THE REQUIRED OPERATIONAL CHARACTERISTICS OF MICROELECTRONIC PRESSURE SENSORS

In paper it is shown that acceleration of sensors production rates requires design process automation, especially at the initial stage which main objectives are synthesis and the choice of design solutions of sensors sensitive elements on the basis of the comparative analysis of a large number of alternative options. For automated synthesis of new technical devices, it is necessary to fill in the database on the basis of the analysis of the known constructions. Based on the analysis of patent and scientific and technical literature the class of sensors for implementation of the drafted theoretical provisions is defined. These are microelectronic pressure sensors. By results of the analysis of patent and scientific and technical literature microelectronic sensors of pressure are classified by the following signs: the improved operational characteristics (precision, responsivity, constancy, reliability, functionality, gabarit, price) and methods of their achievement. It is established that more attention is paid to processing and materials research methods. Basic type designs of pressure microelectronic sensors are defined. The most perspective constructive methods, the required operational characteristics allowing to reach at the same time the maximum quantity and insufficiently studied directions of achievement of the required operational characteristics are revealed. The research has allowed to reveal the most perspective methods of improvement of operational characteristics of pressure microelectronic sensors. Research results are intended for formation of the database containing the formalized description of elementary objects for synthesis of new technical solutions