
Modern and promising semiconductor materials for microelectronics of the next decade (2020-2030)
Author(s) -
A.M. Demidov,
S. B. Rybalka
Publication year - 2021
Publication title -
prikladnaâ matematika and fizika
Language(s) - English
Resource type - Journals
ISSN - 2687-0959
DOI - 10.52575/2687-0959-2021-53-1-53-72
Subject(s) - microelectronics , engineering physics , nanotechnology , semiconductor , engineering , engineering ethics , materials science , electrical engineering