Open AccessResearch of redistribution of impurities in silicon wafers under influence of white light pulses
Author(s) -
Alex Gerasimov,
Г. Д. Чирадзе
Publication year - 2022
Language(s) - English
DOI - 10.52340/ns.2020.10
Subject(s) - redistribution (election) , wafer , impurity , materials science , silicon , indentation hardness , doping , analytical chemistry (journal) , metallurgy , optoelectronics , chemistry , microstructure , organic chemistry , chromatography , politics , political science , law