Open AccessElectrode Properties of Thin Film Battery with LiCoO2Cathode Deposited by R.F. Magnetron Sputtering at Various Ar Partial Pressures
Author(s) -
H.Y. Park,
Young Chang Lim,
Kyu Gil Choi,
K.C. Lee,
G.B. Park,
Min-Su Kwon,
S.B. Cho,
Sang Cheol Nam
Publication year - 2005
Publication title -
journal of the korean electrochemical society/jeongi hwahag hoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-9000
pISSN - 1229-1935
DOI - 10.5229/jkes.2005.8.1.037
Subject(s) - materials science , thin film , analytical chemistry (journal) , sputter deposition , annealing (glass) , microstructure , cyclic voltammetry , argon , crystallization , cavity magnetron , cathode , electrochemistry , sputtering , electrode , chemical engineering , metallurgy , nanotechnology , chemistry , organic chemistry , chromatography , engineering