Open AccessFabrication of Metallic Nano-Filter Using UV-Imprinting Process
Author(s) -
Noh Cheol Yong,
Namseok Lee,
Jiseok Lim,
Seok-min Kim,
Shinill Kang
Publication year - 2005
Publication title -
so'seong ga'gong/soseong gagong
Language(s) - English
Resource type - Journals
eISSN - 2287-6359
pISSN - 1225-696X
DOI - 10.5228/kspp.2005.14.5.473
Subject(s) - materials science , fabrication , nano , reactive ion etching , nanotechnology , filter (signal processing) , etching (microfabrication) , microelectromechanical systems , soft lithography , composite material , layer (electronics) , computer science , medicine , alternative medicine , pathology , computer vision