Open AccessMicrolens Micro V-groove Fabrication by the Modified LIGA Process
Publication year - 2004
Publication title -
so'seong ga'gong/soseong gagong
Language(s) - English
Resource type - Journals
eISSN - 2287-6359
pISSN - 1225-696X
DOI - 10.5228/kspp.2004.13.3.290
Subject(s) - microlens , materials science , liga , fabrication , groove (engineering) , resist , lithography , optics , surface roughness , optoelectronics , photolithography , composite material , lens (geology) , layer (electronics) , physics , medicine , alternative medicine , pathology , metallurgy