Open AccessAssessment of Elastic and Microfailure Properties of MEMS Materials Using Electrostatically Operated Test Device
Publication year - 2002
Publication title -
so'seong ga'gong/soseong gagong
Language(s) - English
Resource type - Journals
eISSN - 2287-6359
pISSN - 1225-696X
DOI - 10.5228/kspp.2002.11.7.575
Subject(s) - materials science , microelectromechanical systems , elastic modulus , composite material , structural engineering , fracture toughness , beam (structure) , displacement (psychology) , toughness , machining , optoelectronics , engineering , metallurgy , psychology , psychotherapist