Open AccessDevelopment of a Piezoelectric Micromachined Ultrasound Transducer using Microfabrication Technology for in Vitro Neuromodulation
Author(s) -
Ryo Furukawa,
Toshitake Tateno
Publication year - 2022
Publication title -
proceedings of the 15th international joint conference on biomedical engineering systems and technologies
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5220/0010938500003123
Subject(s) - microfabrication , piezoelectricity , neuromodulation , transducer , materials science , pmut , ultrasound , capacitive micromachined ultrasonic transducers , ultrasonic sensor , acoustics , biomedical engineering , electronic engineering , engineering , stimulation , composite material , physics , medicine , alternative medicine , pathology , fabrication