Open AccessA5.4 Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip
Author(s) -
Michael Fahrbach,
Erwin Peiner,
Min Xu,
Uwe Brand
Publication year - 2021
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/smsi2021/a5.4
Subject(s) - piezoresistive effect , cantilever , microprobe , diamond , materials science , resonance (particle physics) , optoelectronics , composite material , physics , chemistry , mineralogy , particle physics