Open AccessA5.1 Design, Simulation, Fabrication and Characterization of Piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications
Author(s) -
A. Mehdaoui,
Christof Huber,
J. Becker,
F. Schraner,
Luis Guillermo Villanueva
Publication year - 2021
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/smsi2021/a5.1
Subject(s) - microelectromechanical systems , cantilever , fabrication , characterization (materials science) , viscosity , materials science , piezoelectricity , nanotechnology , mechanical engineering , composite material , engineering , medicine , alternative medicine , pathology