Open AccessP1.21 Simulation von thermischen Einflüssen auf MEMS-Mikrofone
Author(s) -
Hanna Ebbinghaus,
G. Feiertag,
S. Walser
Publication year - 2019
Publication title -
tagungsband
Language(s) - German
Resource type - Conference proceedings
DOI - 10.5162/sensoren2019/p1.21
Subject(s) - microelectromechanical systems , computer science , materials science , environmental science , optoelectronics