Open Access3.2.4 Programmable reference parameters for resonance locking in electro-thermal piezoresistive cantilever sensor
Author(s) -
Andi Setiono,
Michael Fahrbach,
Jiushuai Xu,
Wilson Ombati Nyang’au,
Maik Bertke,
Hutomo Suryo Wasisto,
Erwin Peiner
Publication year - 2019
Publication title -
tagungsband
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensoren2019/3.2.4
Subject(s) - piezoresistive effect , cantilever , resonance (particle physics) , materials science , thermal , optoelectronics , acoustics , electrical engineering , engineering , physics , composite material , atomic physics , meteorology