Open Access4.2.2 - Density and Concentration Measurement Applications for Novel MEMS-based Micro Densitometer for Gas
Author(s) -
C. Huber
Publication year - 2016
Publication title -
tagungsband
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensoren2016/4.2.2
Subject(s) - densitometer , microelectromechanical systems , materials science , fluidics , pressure sensor , pressure measurement , silicon , bar (unit) , optoelectronics , optics , mechanical engineering , electrical engineering , engineering , physics , meteorology
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