Open Access3.1.4 - Silizium-Mikro-Kraftnormal
Author(s) -
Gerry Hamdana,
Chang Yan,
L. Zhou,
Hutomo Suryo Wasisto,
Erwin Peiner,
Lutz Doering,
Uwe Brand,
Tom Frank
Publication year - 2016
Publication title -
tagungsband
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/sensoren2016/3.1.4
Subject(s) - materials science