Open Access3.1.2 - Development of a 3D capable probing system based on electrical near-field interactions for micro- and nanocoordinate metrology
Author(s) -
Zuoyu Sun,
Tino Hausotte
Publication year - 2016
Publication title -
tagungsband
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensoren2016/3.1.2
Subject(s) - microsystem , metrology , nanometre , system of measurement , nano , piezoelectricity , nanotechnology , materials science , field (mathematics) , positioning system , mechanical engineering , computer science , engineering , physics , acoustics , electrical engineering , optics , mathematics , pure mathematics , astronomy , node (physics) , composite material
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