Open Access3.1.2 - Development of a 3D capable probing system based on electrical near-field interactions for micro- and nanocoordinate metrology
Author(s) -
Zuoyu Sun,
Tino Hausotte
Publication year - 2016
Publication title -
tagungsband
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensoren2016/3.1.2
Subject(s) - metrology , field (mathematics) , materials science , nanotechnology , computer science , physics , optics , mathematics , pure mathematics