Open Access2.2.4 - MEMS-basierter Ga2O3- Hochtemperatur-Gassensor
Author(s) -
R. Pohle,
M. Schreiter,
H. Hedler
Publication year - 2016
Publication title -
tagungsband
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/sensoren2016/2.2.4
Subject(s) - physics , materials science
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