Open AccessC4.4 - Stochastic Modelling to Enable Ultrafast High Resolution Capacitive Position Sensing of a Resonant MEMS Mirror
Author(s) -
Lisa-Marie Faller,
Hubert Zangl
Publication year - 2017
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2017/c4.4
Subject(s) - capacitive sensing , ultrashort pulse , microelectromechanical systems , position (finance) , resolution (logic) , ultrafast optics , high resolution , materials science , position sensor , optoelectronics , optics , computer science , physics , acoustics , electrical engineering , laser , engineering , remote sensing , artificial intelligence , geology , finance , angular displacement , economics
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