Open AccessC4.4 - Stochastic Modelling to Enable Ultrafast High Resolution Capacitive Position Sensing of a Resonant MEMS Mirror
Author(s) -
Lisa-Marie Faller,
Hubert Zangl
Publication year - 2017
Publication title -
proceedings sensor 2017
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2017/c4.4
Subject(s) - capacitive sensing , microelectromechanical systems , ultrashort pulse , position (finance) , materials science , resolution (logic) , high resolution , position sensor , ultrafast optics , comb drive , optoelectronics , optics , computer science , physics , acoustics , engineering , electrical engineering , laser , remote sensing , artificial intelligence , geology , finance , angular displacement , economics , alternative medicine , pathology , fabrication , medicine